| 摘要 |
PURPOSE:To enhance efficiency of inspection work of the external appearance of semiconductor pellets by a method wherein the picture of the whole of a group of pellets in taken with the first camera, the transferring course of table is decided as to avoid the pellet having the inferiority mark, and the pellets are inspected with the second camera. CONSTITUTION:An enlarged picture M1 of the surfaces of the whole pellets 2 on a sheet 1 is taken with the camera 18 at the starting position, and coordinates of the respective pellets are decided. Then the picture M1 is scanned with light by the traditional method, and the surfaces thereof are inspected in a lump. The judged result of quality thereof is stored with coordinates, and the transferring course of the table 3 is decided in accordance with the stored contents. The table 3 is transferred in relation to the camera 19 avoiding and jumping over articles of inferior quality according to the transferring course, and inspection is performed in order. The table 3 is regulated minutely as to make an enlarged picture M2 of the pellets 2 to coincide with the center P1 of the camera 19, and inspection is performed by comparison of area as usual. When quality thereof is favorable, a collet descends to take out the pellet 2 from the sheet 1. Because inspection of the surface and inspection of the external picture of the pellet are performed respectively with the two cameras independently, futility of inspection is not generated, and high precise inspection can be performed. |
