| 摘要 |
PURPOSE:To secure the stable deflection and scanning of the electron beam which are performed bymeans of deflecting coils, and preserve full mechanical strength of a vacuum cylinder by preparing the vacuum cylinder from a metal member with large electric resistance. CONSTITUTION:An electron beam deflecting device 10 for the adjustment of the beam axis is constituted of a vacuum cylinder 11, and axis adjusting coils (deflecting coils) 12 which are wound and fixed around the outer surface of the cylinder 11. The cylinder 11 is prepared from a metal member having a high electric resistivity. The thickness of the parts of the cylinder 11 on which the coils 12 are wound is made to be about 0.5mm.. The electron beam within the cylinder 11 is deflected and controlled by a magnetic field generated through the coils 12 by feeding a.c. current into the coils 12, thus the axis of the beam is adjusted. Vacuum cylinder 21 and 22 are connected to the top and the bottom of the cylinder 11. |
