| 摘要 |
PURPOSE:To change over the carrying of a conveyor belt and air positively by a method wherein an air microsensor is mounted to a terminal section of the belt, the back of the substrate is detected, and air carrying is started by the signals while assisting carrying by air discharged from the sensor. CONSTITUTION:The substrate 1 is carried out by means of the conveyor belt 2 moving by means of a pulley 3 turned from an atmosphere having a high temperature heated by means of a heater 9, shifted to a carrying plate 5 to which air ejecting holes 6 are formed in the transfer direction, and carried by air. When the substrate 1 reaches an end section of the belt, the air microsensor 10 detects the back, the carrying air of an air bearing is discharged by the detecting signals, and the substrate 1 delivered from the belt 2 is carried. Air discharged from the sensor 10 assists the delivery of the substrate 1 at that time, and increases a thrust of the air bearing. Accordingly, the substrate can be delivered positively to air carrying from belt carrying. |
