SEMICONDUCTOR LIGHT DETECTION ELEMENT

摘要

PURPOSE:To improve the sensitivity to light and decrease sensitivity dispersion by making light irradiate from the side of a metal or metal silicide provided at a light detector. CONSTITUTION:A opening 9 is made on an electrode 6 at a light detector 5 on a P type Si substrate 1 in such a way that the light can fall through the side of a metal or metal silicide. Platinum or P type silicide are used for the metal or the metal silicide. This improves the sensitivity of the detector and decrease sensitivity dispersion.