| 摘要 |
PURPOSE:To obtain a mass flow flowmeter that makes the flow rate ratio between a sensor part and a by-pass part constant irrespectively of the states of fluid by making the characteristics between the capillary tube in the sensor part and the plural capillary tubes provided in the by-pass part the same. CONSTITUTION:A sensor part 2 and a by-pass part 3 are provided between fluid passage holes 5 and 6, and further a control valve part 4 is provided between fluid paggage holes 6 and 7 so that the fluid introduced through a fluid lead-in port 8 is conducted to a fluid lead-out port 9 through the hole 5, the part 2, the part 3, the hole 6, the part 4 and the hole 7. The part 2 consists of a U-shaped capillary tube 11 and sensor coils 12, 13 wound on the tube 11, and the part 3 is constituted by disposing plural capillary tubes 30 of the same characteristics as those of the tube 11 in a pipe 18. Hence, the state of the fluid flowing in the part 2 and the state of the fluid flowing in the part 3 are the same and the flow rate ratio of both is constant, thus the flow rate of high accuracy is measured. |
