| 摘要 |
PURPOSE:To get rid of a malfunction, by providing a mechanism for removing or selecting a reflected ray, on an alignment device utilizing a reflection of a light beam. CONSTITUTION:In front of a photodetector 6 of an alignment device utilizing a reflection of a light beam, a device which is provided with a cross-shaped slit consisting of, for instance, a vinyl tape, for removing a reflected ray is placed, by which an irregular reflection ray due to a stage difference of a scribing line on the aluminum surface is obstructed, and a malfunction is not caused. |
