| 摘要 |
PURPOSE:To output high pulse laser output stably for many hours by a method wherein an air-tight vessel is constituted of a cylindrical side wall formed with a sitered body of alumina and bottom faces formed with magnesium fluoride, and main discharge electrodes and an auxiliary electrode are provided inside thereof. CONSTITUTION:The cylindrical side wall 11 is formed with the sintered body of alumina, and the bottom faces 12 are constituted of magnesium fluoride to transmit a laser beam. The air-tight vessel is constituted of the side wall 11 and the bottom faces 12. The main discharge electrodes 13, 14 are arranged interposing a tube axis between them, and the auxiliary electrode 15 is provided inside of the side wall 11 along the main electrodes. Lead lines 16, 17 are provided to the main discharge electrodes 13, 14 and a lead line is provided also to the auxiliary electrode 15, and the laser tube 1 is exhausted. Then after the laser tube 1 is heated at the prescribed temperature, krypton, fluorine gas, helium are introduced, and the tube is sealed. |
