| 摘要 |
PURPOSE:To enable realization of the condition of scrubbing a pellet without replacing a cam by providing at least one or more of a scrubbing number adjusting mechanism, a scrubbing amplitude adjusting mechanism and a scrubbing velocity adjusting mechanism. CONSTITUTION:A control disc 23 for adjusting the number of scrubbing is fixed to a cam shaft 12. This disc 23 is provided at a part thereof with a slit 24 extended in the direction of the radius. Moreover, at two places F and G on the track of the slit 24, sensors 27 comprising a light emitter and a light receiver are arranged with the disc 23 between them. The light receivers of these sensors 27 are so devised as to reverse the cam shaft 12 when the light of the light emitters passing through the slit 24 is detected thereby. And, a scrubbing part 15 is formed at a back-and-forth motion cam 13 so that one scrubbing motion is conducted during a period wherein the slit 24 moves from the point F to the point G. By this constitution, in the case when a set value of a control system is (n), the shaft 12 is reversed by (n) times and, the pellet 1 being pressed against a substrate 16 by a bonding tool 2, 2n times of scrubbing are conducted. |
