| 摘要 |
PURPOSE:To prevent connection failure due to stress when cutting, by cutting a piezoelectric ceramic plate by a specific method, when said plate is cut in order to form a probe of plural blocks. CONSTITUTION:On one metallic film 10 of a piezoelectric ceramic substrate 8 having metallic films 9, 10 on both surfaces, a flexible cable 11 is connected together with a packing material 12. Subsequently, the metallic film 9 is cut to width W each, simultaneously the ceramic substrate is cut into depth (t) of about 80%-100% of its plate thickness, and the grooves 13 for forming a comb-like or strip-like vibrator group are provided. Moreover, for instance, in order to form a block of 3 pieces each, the substrate is cut to the metallic film 10 by a narrow groove 14 from on the groove 13. After it has been cut, a lead wire 15 is connected. When the substrate is cut in this way, stress put on the connecting part of the metallic film 10 and the cable 11 is reduced when cutting. Accordingly, connection failure due to stress is prevented. |
