| 摘要 |
PURPOSE:To detect the current of a charged particle beam with high accuracy and control accurate irradiation by arranging an electrode pair so that the charged particle beam can be inserted between the charged particle source and an irradiated body and changing irradiation depending upon the induced current from the electrode pair. CONSTITUTION:The charged particle beam accelerated by an accelerated power supply 12 from a charged particle source 11, for example, an electron beam 13 permits an irradiation path to be deflected right and left by a double deflection type magnet 14 which shifts the flight direction of the particle beam and be reciprocated between electrodes 15. After the induced current detected by this electrode pair 15 is voltage-converted by a current voltage converter 16, it is converted into by a rectification circuit 17. On the other hand, a particle beam 13 which is incident on a driving chamber 18 is prevented from being entered into the driving chamber by making a metallic shutter 19 which can be varied into the horizontal and vertical status stand vertically irrespective of the first irradiated body. As a result, the current of the charged particle beam can be detected with high accuracy and accurate irradiation be controlled. |
