CASETTE HOLDING DEVICE FOR ELECTRON BEAM EXPOSURE

摘要

PURPOSE:To improve positional reproducibility of a cassette as well as ensure the fixed holding of the cassette by making the ratio of the horizontal pushing pressure to the vertical pushing pressure to be applied to the cassette into a value of fixed extent. CONSTITUTION:In a cassette 10 a position is controlled by the pushing pressure from the horizontal direction through a pushing pressure member 9 and a standard plate 7, while the cassette is fixedly held on an X table 1 through the vertical pushing pressure N through the pushing pressure member 12 and the standard plate 11. When thereby the ratio N/F of each pushing pressure F and N is set to 2-5, the positional reproducibility of the cassette 10 is improved.