| 摘要 |
PURPOSE:To enhance the accuracy of a heating resistor and obtain a thermal head in high yield by a method wherein a resistor film on an insulated substrate is removed by etching while leaving the parts for constituting the heating resistors and the parts for constituting electrode bases, and electrodes consisting of conductive films are formed on the electrode base parts. CONSTITUTION:The resistor 2 is formed on the insulated substrate (e.g., a glazed alumina substrate or the like) 1 by vacuum deposition or sputtering, and a pattern 7 of the resistor is produced thereon by a photoengraving process or the like in which the resistor film 2 is removed by chemical etching or dry etching while leaving those parts which are protected by a photoresist pattern and constitute the heating resistors and the electrode bases. Then the electrode parts 6 consisting of conductive films are formed on the electrode base parts at both ends of the heating resistor parts 5. The electrode parts 6 may be formed by masked vapor deposition in which the conductive film is formed only at desired parts. Alternatively, the electrode parts 6 may be formed by a method wherein the heating resistor parts 5 are masked and the other parts are covered with the conductive film, followed by etching. |
