| 摘要 |
PURPOSE:To sense the abnormality of the sensor during the operation of equipment, by applying atmospheric pressure to a sensor circuit based on the compared and judged result of a calibration sensing pressure and a checking pressure, and comparing the sensed value and a reference value. CONSTITUTION:The pressure signal from a pressure sensor 8 is calibrated by a pressure value computing circuit 105 by using a calibration constant. Said value is sent to a display, warning, and diagnostic device 19, and displayed for monitoring, measurement, and diagnosis of the equipment. In the meantime, said computed value is sent to a comparator 108, and compared with preset pressure checking level 107. A judging device 109 judges whether the sensed pressure is larger than the pressure checking level or smaller than that. Based on the judged result, a stop valve 120 is opened and the atmospheric pressure is introduced. The pressure sensor 8 sensed said atmospheric pressure, and said sensed value is compared with a reference value 113 at a comparator 114. Thus the presence of an abnormality of the pressure sensor 8 is judged. |
