| 摘要 |
PURPOSE:To improve the accuracy in detecting an optical axis by providing an eccentric detection means at the beam split position serving as well with the beam waist of a laser main body and arranging an inclination detecting means at the beam split position serving with a beam condensing point. CONSTITUTION:The laser beam position detector D1 as the eccentric detection means composed of a quarter detector is arranged at the position serving with the beam waist 2 of the laser main body 1. The laser beam position detector D2 as an inclination detecting means is then arranged at the position serving with the beam condensing position 4 located between beam expanders 3, 5. When the axis of the laser beam forms an eccentricity, the eccentric amt. is detected with the movement of the beam spot on the detector D1 and for the inclination of the beam the detector D2 performs the detection independently from the detector D1. Consequently the optical axis adjustment on the eccentricity and inclination is extremely facilitated to improve the optical axis detection accuracy. |
