| 摘要 |
PURPOSE:To enable to form a magnetic thin film having favorable adhesion and having few pin holes by a method whrein after an organic compound is irradiated with an electron beam in a vacuum vessel, a metal or a metal oxide is made to be evaporated on the surface thereof. CONSTITUTION:After the organic compound film of polyethylene terephthalate, etc., having thickness of 20mum, for example, is made to pass through the electron beam irradiating region of 5Mrad with the speed of 2m/min in the vacuum vessel, for example, it is set in a vacuum deposition device, and the metal consisting of 80wt% Co and 20wt% Ni is made to be evaporated on the surface thereof. Accordingly adhesion of evaporated thin film is enhanced, and moreover the film having few pin holes can be obtained. |
