APPARATUS AND METHOD FOR DEPOSITION OF ELECTRICAL POWER IN AN ELECTRIC DISCHARGE LASER

摘要

APPARATUS AND METHOD FOR DEPOSITION OF ELECTRICAL POWER IN AN ELECTRIC DISCHARGE LASER An improved electrode configuration and method for the deposition of electrical energy into an electric discharge laser having a gas path transversely disposed to an optical axis and the electric field is disclosed. The electrode configuration includes a cathode, having a row of preionization electrodes with each preionization electrode typically having the configuration of a pin and power electrodes positioned downstream of and in a parallel relationship to the row of preionization electrodes wherein the power electrodes typically have a configuration of a rod, and a planar anode disposed opposite the cathode in a parallel relationship thereto, wherein the cathode and the anode define the gas path therebetween. The electrode configuration is adapted for operation without ballast resistance in the electrical circuit of the power electrodes for high electrical power deposition with high efficiency into a gas having a high pressure and a high flow rate for convective cooling to obtain a laser beam having high power. The electrode configuration provides a discharge having substantially diffuse and uniform characteristics within the discharge region. R-2096