| 摘要 |
PURPOSE:To make synthesis of thick films possible in a short time by forming fine particles of glass by flame hydrolysis reaction using vapor phase reaction and making these transparent in manufacturing thin films of glass constituting a plane optical circuit. CONSTITUTION:A quartz glass substrate 15 installed in a cradie 14 is rotated by a supporting bar 13, and a gaseous starting material for glass is blown from a burner 16 together with oxyhydrogen gas, and the fine particles formed in flames by this are deposited on the substrate 15, whereby a thin film 17 of porous glass is synthesized. Next, a mask 19 cut with slits in the construction of the optical waveguides to be manufactured is placed, and gaseous starting material and the like for glas of the composition for making refractive index higher than that of the glass film 17 are blown out from the burner 16, so that fine particles 18 of glass are deposited thereon in the pattern resembling to that of the optical waveguides. The mask 19 is removed, and a glass film 21 is deposited by the similar method, after which the substrate is heated to convert the entire part to transparent glass, whereby the thin films for optical waveguides are produced easily. |
