发明名称 VAPOR CLEANING DEVICE
摘要 PURPOSE:To preferably clean without moth by contacting part of a moisture trap member which is maintained at a lower temperature than the boiling point of water with solvent vapor. CONSTITUTION:The trap 8c of a moisture trap member 8 is maintained at approx. 82 deg.C and hence at the boiling point of isopropyl alcohol lower than that of the water due to the fact that the heat of a solvent 2 is transmitted from a heat collector 8a dipped in isopropyl alcohol 2 heated at 82 deg.C through a heat transmitting unit 8b. When the solvent vapor and moisture rise in the passage of the trap unit 8c, the vapor 4 does not dew since the trap 8c is at approx. 82 deg.C, but the moisture is dewed since it is lower than the boiling point of the water. Accordingly, only the vapor 4 will rise to clean an article 6. Thus, the moth and fog on the surface of the article caused by the mixture of moisture are not produced.
申请公布号 JPS5780722(A) 申请公布日期 1982.05.20
申请号 JP19800156538 申请日期 1980.11.07
申请人 FUJITSU KK 发明人 ARAIHARA SATOSHI
分类号 B08B3/08;H01L21/30;H01L21/304 主分类号 B08B3/08
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