| 发明名称 |
IMAGE HARDENING PROCESS |
| 摘要 |
<p>AN IMPROVED IMAGE HARDENING PROCESS Resist images are hardened so that they are flow resistant at elevated temperatures by coating the image with a layer of a porous metal or metal oxide. YO978-026</p> |
| 申请公布号 |
CA1123683(A) |
申请公布日期 |
1982.05.18 |
| 申请号 |
CA19800362153 |
申请日期 |
1980.10.10 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
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| 分类号 |
B05D1/32;G03F7/16;G03F7/40 |
主分类号 |
B05D1/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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