发明名称 |
MOISTURE SENSOR AND METHOD OF PRODUCING SAME |
摘要 |
<p>A moisture sensor including a thin layer of tantalum oxide applied to a moisture insensitive substrate and at least two electrodes placed on the tantalum oxide layer spaced apart from each other wherein the tantalum oxide layer comprises the oxide of a highly resistive low density tantalum where the tantalum in the layer applied to the substrate has a density of less than 15 g/cm3.</p> |
申请公布号 |
JPS5778104(A) |
申请公布日期 |
1982.05.15 |
申请号 |
JP19810098484 |
申请日期 |
1981.06.26 |
申请人 |
ENDORESU UNTO HAUZAA GMBH UNTO CO |
发明人 |
ERUNSUTO RIYUUDAA;TORAUGOTSUTO KARUFUASU |
分类号 |
H01C7/00;G01N27/12;G01N27/22;H01G7/00 |
主分类号 |
H01C7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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