发明名称 LIQUID PHASE GROWING METHOD
摘要 PURPOSE:To reduce the cost and to equalize the quality of solution based on a burning effect, by using the second solution having a replenishing composition in addition to the first growing solution, and reusing the growing solution whith has been used before. CONSTITUTION:Solution bottles in a plurality of lines on a growing boat are provided so that they can be divided by a separating pieces 4 of partitioning plate 3. In the botles 1-1'' in one line, the specified first solutionIfor growing is put. In the bottles 2-2'' in the other line, the second solution II with the replinishing composition which becomes the same composition as the solutionIwhen the solutionsI and II are blended after the growth of a crystal film by the solutionIis put. After the growth of the crystal film by the solutionI, the separating pieces 4 are operated, and the solutionsIand II are blended. When the second growth is performed, said blended liquid is heated to the growth starting temperature, the blended liquid is separated into the bottles 1-1'' and 2-2''. The second growth of the crystal film is performed by using the bottles 1-1''. The same procedure is repeated hereinager.
申请公布号 JPS5776831(A) 申请公布日期 1982.05.14
申请号 JP19800153137 申请日期 1980.10.31
申请人 FUJITSU KK 发明人 NISHITANI YORIMITSU;NAKAI SABUROU
分类号 H01L21/208;C30B19/06;H01S5/00 主分类号 H01L21/208
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