发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To improve the degree of integration of an integrated circuit by forming a trapezoid polysilicon layer, the surface thereof is oxidized, under the first wiring layer of section where the first wiring layer and the second wiring layer separated by a layer insulating layer contact. CONSTITUTION:When the first wiring layers 1, 11 are shaped onto a lower layer insulating layer 4 formed onto a semiconductor substrate not shown and the second wiring layer 21 and a cover glass layer 24 are molded through an upper layer phosphours-silicon-glass layer 14, the trapezoid polysilicon layer 6, the surface thereof has an oxide film 6', is formed under the section where the first wiring layer 1 and the second wiring layer 21 contact. Accordingly, the second wiring layer can be shaped positively even when the positions of through-holes for contact are displaced, and the degree of integration is also improved because the contact forming section need not be magnified and molded.
申请公布号 JPS5776864(A) 申请公布日期 1982.05.14
申请号 JP19800153136 申请日期 1980.10.31
申请人 FUJITSU KK 发明人 INABA TOORU
分类号 H01L23/522;H01L21/768 主分类号 H01L23/522
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