| 摘要 |
PURPOSE:To maintain the entire part of a flat body having large area stably at a desired constant temp. by using a holding plate consisting of a good heat conductor provided with chucking holes, thermomodules and fluid flow passages. CONSTITUTION:A flat body to be the object is placed on a holding plate 2, and said body is held in tight contact with the surface 1 of the plate 2 by driving the decompressing mechanisms connected to chucking holes 3. While water is flowed into water flow passages 7, an electric current supplying mechanism is driven to supply the electric current of the magnitude corresponding to the difference between the temp. measured by the thermometers buried in the plate 2 and a set temp. to thermomodules 6. Thereby, the plate 2 is maintained at the set temp. and the state of the flat body is maintained at the constant temp. state equal to that of the plate 2 for an arbitrary time. |
