GAS PLASMA ETCHING DEVICE,申请号JP19800151562-传众专利搜索

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发明名称	GAS PLASMA ETCHING DEVICE
摘要
申请公布号	JPS5776188(A)	申请公布日期	1982.05.13
申请号	JP19800151562	申请日期	1980.10.29
申请人	FUJITSU KK	发明人	YOSHIZAWA TAKESHI
分类号	C23F4/00;C23F1/08;H01L21/302	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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