| 摘要 |
PURPOSE:To obtain powerful mercury spectrum of 185 nm wave length having favorable efficiency by a method wherein an ultraviolet ray source is equipped in the first vessel, and it is fixed inside of the second vessel, and gas not to absorb the ultraviolet rays is made to flow for cooling. CONSTITUTION:The radiating part of the ultraviolet ray source 1 is equipped in the first vessel 2, and it is fixed inside of the second vessel 3. N2 gas not to absorb 180-200 nm wave length is introduced 4, and is discharged into the vessel 3. A window 6 for penetration of ultraviolet rays manufactured with a synthetic quartz is provided at a part of the vessel 3, and the ultraviolet ray are radiated outside of the vessel. A mask 7 applied with an electronic radioactive material is equipped facing to the window 6, electrons discharged from the mask 7 by excitation of ultraviolet rays are accelerated 9, those are controlled or condensed by magnetic field of a coil 19, and are introduced onto a wafer 8 applied with a photo sensitive material of polymethyl methacrylate, etc. By this constitution, the part of the light surce 1 positioning outside of the vessel 2 prevents excess rise of mercury vapor pressure to enable increase of electric input, and powerful mercury spectrum of 185 nm wave length can be obtained having favorable efficiency. |
