| 摘要 |
PURPOSE:To improve accuracy of thickness by installing in a cavity provided to the surface plate a thickness detector element which continuously monitors the thickness of item being processed, and by measuring accurate temperature near the coil. CONSTITUTION:A cavity 12 is provided to the upper surface plate 1, cut from above and reaching close to the facing surface of the lower surface plate 2. Removably installed in this cavity 12 is adetector 15 consisting of a thickness detector element 13 and a temperature detector element 14. Although an error is unavoidable for the thickness detector output due to heat generated by polishing operation, a counter measure is provided by the temperature detector element 14 which continuously monitors the temperature near the thickness detector. The output from the temperature detector is transferred through a compensator to the amplifier where it is treated with the output from the thickness detector element 13. Final output from the amplifier is a temperature compensated thickness value of reliable thickness accuracy. |
