| 摘要 |
PURPOSE:To inspect a surface acoustic wave element with facibility and rapidity, by determining whether or not interelectrode capacitance of the surface acoustic wave element is in a satisfactory condition by measuring it with a searching probe. CONSTITUTION:When a probe 4 is connected to electrodes 2 and 2' of a surface acoustic wave element 1 mounted on a specimen holding table 5 of a movable device 6 which is designed capable of freely moving in horizontal and vertical directions, a capacity between the electrodes 2 and 2' is measured by an electrostatic capacity meter 10. By making a judgement on the interelectrode capacitance, which sensitively varies in accordance with abnormality of pattern of this element 1, by measuring it, it is possible to easily and quickly inspect the surface acoustic wave element to determine whether or not it is in a satisfactory condition. |
