| 摘要 |
PURPOSE:To reliably detect an insulating layer, by a method wherein the insulating layer is formed on a conductive substrate, such as semiconductor substrate, and a plurality of metal electrodes are mounted at the insulating layer to oxidize the metal electrodes into an anode. CONSTITUTION:An aluminum electrode 4 is first formed on a surface of an insulating layer 2 on a semiconductive substrate 1. The aluminum electrode is then oxidized by an anode oxidation method to produce the aluminum electrode 4 on the insulating layer 2, where pin holes or cracks exist, into an oxidized electrode 6. The electrode 6 becomes transparent, which allows the color of the insulating layer to appear in sight. The aluminum electrode 4 on a part, where no pin hole nor crack exists, is not oxidized, and thereby it is left as it is of an aluminum color. The number of the aluminum electrodes 4 in an aluminum color and the number of the electrodes 6, through which the color of the insulating layer is seen, are counted visually, and this permits the correct inspection of a pin hole density. |
