| 摘要 |
PURPOSE:To enable fine movement at a high accuracy by building up a finely displacing table with a plurality of arms connected to each other by a connection section elastically bendable, a press moving section, a fixed section and a displacing table. CONSTITUTION:A finely displacing table 1 consists of a press moving section 2, arms 4, 6 and 8 connected with connecting sections 3, 5, 7 and 9 which are elastically bendable, a balancing section 10, a fixed section 16 and a displacing table 12. Two finely displacing tables 102 and 103 are so arranged on a base 101 as to cross in the direction of displacement through a spacer 104 and engaged with a carrier base 105. The carrier base 105 is finely shifted or fixed by moving the press moving section 2 with a micrometer or stepping motors 110 and 111. This can eliminate the lowering of accuracy due to a gap and others in the structural elements and enables fine movement in an extremely precise manner. |
