| 摘要 |
PURPOSE:To obtain certainty and stability from a standpoint of manufacturing by providing plural electricity.heat conversion elements and a function element driving the same on a same semiconductor substrate plate in a laminated structure to enable certain and stable high speed recording. CONSTITUTION:A semiconductor substrate plate 115 is constituted from an electricity/heat conversion element arranged part 102, a drive circuit part 103 constituted by a function element and a grooved lid member 104. To said grooved lid member 104, grooves 106 covering each electricity.heat conversion elements 105 and a groove 107 for a common liquid chamber are provided. The electricity.heat conversion elements 105 have a common electrode 109, a collector electrode 111 and a heat generating resistance part 112. A transistor 110 has a usual transistor structure, that is, a collector region, a base region and an emitter region. |
