| 摘要 |
PURPOSE:To prevent transfer of vibration starting from a base in such a way that momentum of the base to support an object to be prevented from vibration is detected, and a vibration-proofing means is operated by adding its signals, its one-staged or multi-staged integrating or differentiating signals in their proper proportion. CONSTITUTION:An object 1 to be prevented from vibration is supported to be able to slide relatively in horizontal direction to a base 2. Momentum in horizontal direction of the object 1 to be prevented from vibration which has been resulted from the vibration of the base 2 is detected by a momentum detector 3 that is installed on the base 2. Voltage of detecting signals are amplified through a detecting circuit 4, and transmitted to a controller 5. Arithmetic process is applied to the detecting signals in the controller 5, current is amplified, transmitted to a servo valve 6, while an actuator 8 is driven in the direction of damping the vibration of the object 1 to be prevented from vibration by controlling the flow direction to be fed from the hydraulic source 7 to the actuator 8 for anti-vibration driving and its flow rate. |
