| 摘要 |
PURPOSE:To detect the secular change of a developing soln. accurately, and perform pattern formation on a photoresist layer with good accuracy by detecting the change in the fluorescence emission intensity of the developing soln. and controlling the development time. CONSTITUTION:A branch pipe 43 is provided between a circulating pump 23 and a filter 24 for the developing soln., and a flow cell 41 and a spectrophotofluorometer 40 are connected thereto. With this constitution, the developing soln. passes through the cell 41, and is excited by the meter 40 to emit fluorescence. The intensity of the fluorescence is read with an indicator 42, and the developing time for substrates to be developed is controlled by a motor 34 of variable speeds. Thereby, the secular change of the developing soln. is detected accurately by the change in the luminous intensity of the fluorescence and the pattern formation on the photoresist layer exposed under the same exposure conditions is accomplished with good accuracy. |
