| 摘要 |
PURPOSE:To prevent the defect of leakage in package by a method wherein green sheets are adhered under pressure to form package due to pressure generated owing to expansion of liquefied gas and also rise of temperature inside a leak-tight chamber by heating. CONSTITUTION:Liquid nitrogen 12 is infused into a sealed chamber 11 made of stainless steel, and multiple green sheets including 14A, 14B and 14C are placed on a stainless mesh 13 in the chamber 11. Then, the chamber is closed with a sealing lid 15 and a liquid nitrogen introducing valve 16 is closed. A heater 17 buried in the chamber 11 wall with the help of an insulating pipe is powered to vaporize liquid nitrogen. Thus, laminated green sheets 14A, 14B and 14C are evenly pressed to adhere by the inflating force generated when liquid nitrogen is vaporizing and by the temperature rise inside the sealed chamber due to heating of liquid gas. |
