| 摘要 |
PURPOSE:To perform highly accurate voltage measurement in a short time by using an electron beam, in the case secondary electrons, which are emitted from a specimen when an electron beam is irradiated on the specimen, are analyzed, by constituting analyzing grids by the first-fifth grids. CONSTITUTION:The semispherical metal grids 1 for energy analysis comprises from the first to the fifth grids G1-G5. To the grid G1, a positive voltage V0 which induces the secondary electrons 5a from the specimen 3 is applied. To the grid G2, a voltage V which analyzes energy is applied. To the grid G3, a voltage V-DELTAV is applied. To the grid G4, a voltage V-VW(¦VW¦>¦DELTAV¦) is applied. To the grid G5, a voltage V-VW-DELTAV is applied. Measuring voltages corresponding to the values of energy spectra S1 and S2 of the secondary electrons 5a charged in G2 and G4 are taken out. Since the energy spectra S1 and S2 at two different places are measured by one irradiation of the electron beam, the measuring time is shortened, the stabilization in not required to be strictly defined, and the measurement errors due to configuration effects are eliminated. |
