| 摘要 |
PURPOSE:To prevent explosion of dilution-purpose H2 in the event of gas leakage by utilizing the gas adding monosilane 1% or more to phosphate or diborane. CONSTITUTION:Monosilane gas easily catches fire naturally when even a very slight amount of the gas makes contact with the air and the monosilane of 1% which is diluted with Ar causes a spark in the dark place. Therefore, when PH3, B2H6 of H base including monosilane may be leaked out, the monosilane instantaneously facilitates burning of H2 as an ignition source. The H2 burns at a leakage port, but causes no explosion. According to the above constitution, it is desirable that an Si film is growed on a substrate through glow discharge by utilizing monosilane, phosphine and diborane diluted with H2 respectively. |
