| 摘要 |
PURPOSE:To simplify a manufacturing process of a photovoltaic device by obtaining electric coupling of isolation and adjacent photoelectric conversion regions with each photoelectric conversion region after performing a fine-processing of these isolation and coupling parts through irradiation of energy beams and by forming a transmission part where it allows a part of incident lights to penetrate after utilizing a mask process. CONSTITUTION:A part of laminates irradiated by the second laser beam LB2 is removed from the laminates in order to divide the laminates of an amorphous semiconductor film 5 and the second electrode film 6 which are uniformly in a row by straddling on a plurality of photoelectric conversion regions 7a and 7b... each laminate of 7a and 7b... and prevents penetration of the second laser beam LB2 to a lower layer because of existence of a thick insulating member 4ab.... Many transmission parts 9, 9... like stripes are formed so as to allow a part of incident lights to penetrate by utilizing a simple mask process at respective photoelectric conversion regions 7a and 7b.... Especially, as the transmission parts 9, 9... permit the part of the incident lights to penetrate, they eliminate the need for performing such a fine-processing as required for a coupling part for conductivity members 3ab... that are in the state of the same unavailable regions. |
