| 摘要 |
PURPOSE:To make the position of a visible ray to coincide with an invisible laser beam and to enhance precision of irradiating position of the invisible laser beam by a method wherein the ring type beam consisting of the visible ray is converted into a converging or diverging ring type beam by a middle reflector. CONSTITUTION:When the laser beam sent from an invisible laser beam source 1 of CO2 laser, etc., is made to penetrate a hollow part 10a, and is reflected by the reflector 4, and to be converged to irradiate a material to be processed, the visible laser beam source 7 is used for monitoring of optical axis, the beam 8 thereof is converted into a ring type beam by a conic splitter 9, it is diverged by the middle reflector 10 consisting of a convex mirror, and it is made to irradiate the position of the same converging point with the invisible laser beam through the reflector 4, a lens 5. Accordingly because discrepancy of position of converging point to be caused by dependency of the focus position of the a NaCl lens 5 to wave length can be compensated, the irradiating position of the invisible laser beam can be decided with favorable precision. |
