| 发明名称 |
Scanning-image forming apparatus using photo electric signal. |
| 摘要 |
<p>A scanning-image forming apparatus using a photore- sponse signal (such as a photo-voltage signal) obtained by scanning the surface of a semiconductor specimen (1) with a photon beam (5) is subjected to second order differentiation (33). An image is displayed (7) by employing the second derivative of the photo-response signal as a modulation signal (Z).</p> |
| 申请公布号 |
EP0050475(A1) |
申请公布日期 |
1982.04.28 |
| 申请号 |
EP19810304798 |
申请日期 |
1981.10.14 |
| 申请人 |
HITACHI, LTD. |
发明人 |
MUNAKATA, CHUSUKE;KOHNO, HIDEKI |
| 分类号 |
H01L21/66;H01L31/02;H04N1/409;G01R31/26;G01R31/265;G01R31/308;(IPC1-7):01R31/26 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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