| 摘要 |
PURPOSE:To form a flat surface by forming a trapezoidal shape at the bottom surface of an eventual through hole of three through holes formed at a slide member to become a liquid reservoir so that the oblique surface becomes in a sliding direction. CONSTITUTION:A liquid reservoir 21 made of rectangular through hole is formed at a slide member 25 sliding on a supporting base 1 buried with dummy and epitaxially growing substrates 3, 4, and Pb1-XSnXTe material is filled therein. A liquid phase epitaxially growing device is inserted into a reaction tube, and is heated. Then, the liquid in the reservoir 21 is molten to sequentially slide the slide member 25 to form epitaxial phase. At this time a top layer forming liquid reservoir 21 is formed at the bottom of the through hole in a trapezoidal shape obliquely crossed in the sliding direction. In this manner, when the slide member 25 is moved in a direction B, the liquid phase attached to the substrate 4 can be removed, the epitaxially grown surface becomes flat, and the yield of the laser element to be thus formed is improved. |
