| 摘要 |
<p>PURPOSE:To enhance contamination removing efficiency, by providing a humidity sensing material on an indirectly heated heater, and reducing the thermal loss of a humidity sensing body caused by heating of the heater. CONSTITUTION:The indirectly heated heater 13 is provided in in a metallic tube 11 of the humidity sensing element 10. The ceramic humidity sensing material is applied on the surrounding surface of said metallic tube 11 and burned, and an element main body 14 is formed. A tubular porous electrode 15 is arranged on the surface of said element main body 14. Lead wires 16 are guided out of the electrode 15 and the metallic tube 11 which is used as another electrode. The resistance of the humidity sensing body is measured through said lead wires 16, and the relative humidity in an atmosphere is sensed.</p> |
