| 摘要 |
PURPOSE:To manufacture the titled silicon plate to which a fiber can be inserted easily, at a low cost, by simultaneously forming a V-groove for installing an optional fiber and a widened-out groove for guide, on a silicon plate and its end part, respectively, by means of anisotropic etching. CONSTITUTION:On a silicon plate 2 which has formed a protective film of SiO2, etc., a pattern of a widened-out groove is printed by photoetching technique, by use of a mask 3' having a mask pattern 7 of chromium oxide, etc., and when anisotropic etching of silicon is executed by making SiO2 etc. a protective film, a V-groove 1 and an end part groove 5 for guide are formed simultaneously. In this way, said silicon plate to which a fiber 6 can be inserted easily is manufactured easily. |
