| 摘要 |
PURPOSE:To carry out the continuous plasma treatment of a continuous web, industrially, under open conditions, by connecting a vacuum zone having a degree of vacuum high enough to the plasma generation openly to the outer atmosphere through the zones for increasing the vacuum degree stepwise, and the zones for owering the vacuum degree stepwise. CONSTITUTION:A continuous web 14 is introduced continuously from the outer atmosphere into the plasma generation zone (e.g. plasma reactor tube 1) maintained at a vacuum of <=1Torr, through a plurality of zones having stepwisely increased degree of vacuum, for example, a front vacuum tube having an inlet 9 and consisting of the zones 7 and 8, wherein the vacuum degrees in the zones are heightened stepwise by evacuating with a vacuum pump through the evacuation ports 10 and 12. The web 14 is subjected to the plasma treatment in the reactor tube 1 by glow discharge, and taken out continuously from the outlet 9' through a plurality of zones for decreasing the vacuum stepwise to the atmosphere pressure (e.g. the above front vacuum tube is attached inversely to the outlet 3' of the plasma reactor tube). |
