| 摘要 |
PURPOSE:To continously perform the different processings of a processing index by providing a stocker before a stopping position temporarily and accommodating tentatively a work. CONSTITUTION:A wafer 2 is fed to a photosensitive processor 1, is then processed, and is thereafter fed to a stocker 6. Four belt conveyors 7 are sequentially moved, the wafer 2 is temporarily stopped at the end of a conveyor 5 and when a vacant is produced at a development processor 3, the wafer 2 is automatically fed to the processor 3. After the wafer is processed, it is fed to the next step. The existence or absence of the wafer is detected by a pair of light emitting unit and photodetector in each belt conveyor 7 and the conveyor 5 of the stocker, and the information is fed to a mechanism. Since this configuration has a preliminary wafer, the processor 3 is not stopped even if the processor 1 is temporarily stopped to clean and exchange the mask. Since the processor 3 is slow in the processing index but the wafer 2 is contained in the stocker 6, the processor 1 is continously operated without stoppage. |
