发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To enable the stable bonding of a wire irrespective of the looseness of the wire by once increasing the feed of the wire with respect to a bonding tool, then returning the excessive quantity of the wire and setting the prescribed feeding quantity. CONSTITUTION:A clamper 12 of a wedge bonding unit 10 is, for example, supported to a head 13 longutudinally relatively movably with respect to an arm 11 secured with a wedge 1. The clamper 12 is reciprocated by cam and lever means 15, clamps 12a, 12b are opened or closed by cam and lever means 16, and the wire 3 is clamped. When the bonding is finished and the wire 3 is disconnected, the wire is fed by the operation of the clamper 12 for the next bonding. In case the feed of the wire is increasd in the prescribed quantity ( deg.C2) more than the predetermined quantity (l1) and the excessive quantity (l2-l1) is returned by programming the clamper 12. In this manner, the feed of the wire can be secured even if the feed of the wire is not carried out to meet the moved distance of the clamper due to friction or the like, thereby improving the reliability of the bonding.
申请公布号 JPS5764940(A) 申请公布日期 1982.04.20
申请号 JP19800140458 申请日期 1980.10.09
申请人 HITACHI SEISAKUSHO KK 发明人 TANIGUCHI YUUZOU
分类号 H01L21/60 主分类号 H01L21/60
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