| 摘要 |
PURPOSE:To make a titled member stable to environmental changes and prevent its photo-fatigue resistance and residual potential by providing a specific intemediate layer between a substrate and a photoconductive layer consisting of amorphous silicon. CONSTITUTION:An intermediate layer 102 blocking the inflow of carriers from substrate side and permitting the passage of the carriers produced in a photoconductive layer by the irradiation of electromagnetic waves to the substrate side is constituted of a non-photoconductive amorphous material consisting basically of silicon atom and oxygen atom and contg. hydrogen atom between a photoconductive layer 103 consisting of an amorphous material constituting basically of silicon atom and contg. halogen atom and a substrate 101. The amorphous material is expressed by [a-(SixO1-x)y; H1-y, where 0<x<1, 0<y<1], wherein the (x) in a 0.33-0.45 range and the (y) in a 0.98-0.65 range are preferable. The thickness of the intermediate layer is 30-1,000Angstrom . |
