发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To eliminate the need for a large amount of resist, and to reduce manufacturing cost by pasting an acid-proof etching preventive plate together on the surface of a substrate on which an electric circuit is formed through solder and etching the rear of the substrate. CONSTITUTION:The acid-proof etching preventive plate 9 is pasted together on the surface 4 of the wafer 1, on which the resist 7 is applied as a buffering agent, through the solder 8. A Pyrex glass board is prefereble as the preventive plate. The wafer is immersed in an etching liquid under this condition, and the rear back 5 is etched. Accordingly, a large amount of resist are not used for etching the rear of the wafer, the wiping-off of the resist rounding to unnecessary sections is unnecessitated, and manufacturing cost is reduced.
申请公布号 JPS5762532(A) 申请公布日期 1982.04.15
申请号 JP19800138307 申请日期 1980.10.03
申请人 FUJITSU KK 发明人 NAMIKATA SHIGEYUKI;SHINDOU JIYUNJI
分类号 H01L21/306;(IPC1-7):01L21/306 主分类号 H01L21/306
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