| 摘要 |
PURPOSE:To improve the precision of the position, dimensions, the form of a cavity, by providing boundaries of the cavity by a UV resin layer on a substrate. CONSTITUTION:Vibrating electrodes 2 and 3 are fitted to a piezoelectric ceramic plate 1, and a UV resin 8 is coated to the surface,,and electrodes 2 and 3 and their peripheral part are shielded by 9 and 10 to irradiate ultrviolet rays. The UV resin in the irradiated part is hardened. The unhardened resin is removed, and recesses 11 and 12 are filled up with wax 13 and 14. Next, a resin 15 is caused to adhere to the surface, and wax 13 and 14 are melted to absorb the resin 15 or to subject the resin 15 to chemical reaction, thereby forming cavities 16 and 17. Since the UV resin is used mainly for determining positions, dimensions, and forms of cavities 16 and 17 on the substrate 1, it is sufficient if the UV resin exists near boundaries. By this constitution, the characteristic of a resonator becomes uniform, and diemensions and forms of cavities are changed freely. Further, the strength of the substrate is improved by the hardened resin. |
