| 摘要 |
PURPOSE:To improve the efficiency of manufacture in excellent reproducibility by a method wherein magnetite or magnetite containing additives is used as a target, and the target is bonded to a sputter electrode cooled under an excellent thermal conduction condition and sputtered. CONSTITUTION:When magnetite or magnetite containing the additives is used as the target, and sputtered in a neutral or oxidizing atmosphere, and the ferromagnetic thin-film, the principal ingredient thereof is magnetite, is directly formed on a substrate, the target is bonded directly on the sputter electrode under the excellent thermal conductive condition. This bonding method employs a material, which is one kind of solder as an adhesive body having excellent thermal conductivity and can bond an oxide at the low melting point, lead solder generally used, indium solder or silver solder or the like. Accordingly, reproducibility is improved, high sputtering power, large sputtering rate, can be obtained, and the oxide magnetic thin-film can easily be formed in the high efficiency of manufacture and high yield. |
