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发明名称
CASSETTE RETAINING DEVICE OF ELECTRON BEAM APPARATUS
摘要
申请公布号
EP0037568(A3)
申请公布日期
1982.04.14
申请号
EP19810102540
申请日期
1981.04.03
申请人
TOSHIBA MACHINE COMPANY LIMITED;TOKYO SHIBAURA DENKI KABUSHIKI KAISHA
发明人
TOJO, TORO;SUGIHARA, KAZUYOSHI;HATA, SHUNTARO;NUMAGA, HIROOKI;MUKOOYAMA, HARUHISA;SUZUKI, YOSHIO
分类号
H01L21/027;G21K5/08;H01J37/20;H01L21/673;(IPC1-7):H01J37/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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