摘要 |
PURPOSE:To prepare ultrafine powder of carbide with a low content of impurity, by bringing an electrically-conductive material, e.g., carbon, etc. into contact with a substance, e.g., silicon, etc. so that electricity is applied in a vacuum container having a specific introduced gas. CONSTITUTION:The silicon block 3 as a substance is placed on the base 2 made of a carbon material in the vacuum container 1. The electrically-conductive member 4 held by the holding part 5 made of a carbon material is brought into contact with the surface of the silicon block 3. After the silicon block 3 is preheated, electricity is applied by the electric wires 8 and 9 so that electric current is applied through the silicon block 3 and the base 2. A carbon component-containing compound, e.g., methane gas, is fed from the circular nozzle 11 through the feed pipe 14. Consequently, silicon is reacted with carbon, silicon is reacted with methane gas, and ultrifine powder of silicon carbide is attached to the inner wall of the vacuum container 1. After the reaction is over, the ultrafine powder is gathered to collect silicon carbide. |